High resolution – Automated X-ray Inspection (HR-AXI) is a new category of inline transmissive inspection and metrology equipment designed to bring front of line semiconductor fab-like inspection to the backend manufacturing line.
HR-AXI is not traditional X-ray imaging. Our unique and proprietary data collection architecture rapidly collects large field of view transmissive data at full resolution with 16 bit high bandwidth sensitivity. These data are analyzed in real time to detect small deviations in the structure of user defined regions of interest.
Using leading edge data processing and machine learning techniques, characteristics are quantified, interpreted, and recorded. Variation in features such as solder joints is precisely calculated and located for screening and process control feedback.